Hot-Wire Chemical Vapour Deposition (HWCVD) hydrogenated amorphous silicon (a-Si:H) compact 3D slope waveguide interconnect for vertical coupling in multilayer silicon photonics platform
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Hot-Wire Chemical Vapour Deposition (HWCVD) hydrogenated amorphous silicon (a-Si:H) compact 3D slope waveguide interconnect for vertical coupling in multilayer silicon photonics platform